Witryna7 sty 2011 · The beamline concept of IMPHEAT is the same as Nissin's ion implanter EXCEED 9600A for silicon device manufacturing. To meet the implantation process for SiC device fabrication, a new type ion source that can produce aluminum (Al) ion beam and a high temperature platen have been developed and installed. The maximum … Witryna15 paź 2009 · On Thursday, October 15, 2009, a trademark application was filed for IMPHEAT with the United States Patent and Trademark Office. The USPTO has given the IMPHEAT trademark a serial number of 79076296. The federal status of this trademark filing is NOT AVAILABLE as of Tuesday, June 9, 2024. This trademark is …
(Invited) P-Type and N-Type Channeling Ion Implantation of SiC …
WitrynaInproheat Industries is a premier industrial energy solutions provider for the industry. We provide top-tier refractory & foundry products. Visit here. WitrynaIon Implantation. Ion implantation is a method of changing the properties of a solid or modifying its surface by accelerating and injecting ionized atoms or molecules into the solid. In particular, the method of implanting impurity elements to form semiconductors, called dopants, is called doping technology, and is the most widely used method ... homeward inn antigonish
Development of Medium Current Ion Implanter
WitrynaHigh productivity medium current ion implanter 'IMPHEAT' was developed for a commercial silicon carbide (SiC) device production. The beamline concept of … Witryna23 lis 2024 · In this work, we present results of both p-type and n-type channeled implants into 4º offcut N-type SiC substrates and Epitaxial layers using a Nissin Ion Equipment IMPHEAT system. Witryna7 lis 2012 · We developed the high temperature ion implanter “IMPHEAT” for mass production of 6 inch SiC wafers. IHC (Indirectly Heated Cathode) ion source was … homeward legal complaints